Optical Metrology

First semester 2019

Andrés Marrugo, PhD
Universidad Tecnológica de Bolívar

Aims and Scope

This semester course is an introduction to optical metrology. It is aimed at graduate students in the Faculty of Engineering. We will focus on the practical and theoretical aspects of techniques in optical metrology.

At the end of the lectures, one would be able to:

• Have clear idea of challenges in metrology due to increasing trend towards miniaturisation.
• Understand many different metrological devices and principles and applicability of those devices.
• Understand the process and provide metrological solution for the improvement of a process.

Outline

This website will be updated as we go along.

Lecture 1: Introduction

We will be discussing the main aspects about metrology and why it is so important in manufacturing.

Lecture 1 slides

Optional Reading

• Optical metrology overview

Lecture 2: Methods in Surface Metrology

We will first dive into this topic to do a lab practice next friday March 1st. In this lecture we introduce several basic concepts about surface measurements and characterization. The quantification of roughness and the different roughness scores. How roughness is related to the manufacturing process.

Please read the Robust 3D surface recovery paper below.

Lecture 2 slides

Readings

• Robust 3D surface recovery paper
• David Whitehose - Surfaces and their Measurement - Chapters 2 and 4

Assignment 1

Surface roughness characterization. Due date: 2019-04-20.

• Assignment 1
• White-Light Interference 3D Microscopes
• Standard 3D matlab .mat file
• Standard 3D in csv format

Suplementary material for assignment 1

David J. Whitehouse-Surfaces and their Measurement Chap 1 and 2 Specification-iso-4287

Lecture 3: Basic Optical Principles and Imaging Systems

In this lecture we will discuss the Basic Optical Principles and Imaging Systems.

Lecture 3 slides

Recommended Readings

• Gasvik - Optical Metrology - Chapters 1 and 2
• Giancoli - Optical Instruments

Lecture 4: Random Data and Characterization of Measurement Systems

In this lecture we will be discussing about random data, their properties and measurement systems. We will also discuss static and dynamic characterization of measurement systems.

Lecture 4 slides

Recommended Readings

• J Bendat and A Piersol - Random Data - Chapter 1
• A student’s guide to Data and Error Analysis - Chapter 5 and 7
• A Beginner’s Guide to Uncertainty of Measurement
• Linear regression

Lecture 4: Cont’d

In this lecture we focus on practical aspects and calculations of characterization of measurement systems, calibration and uncertainty via confidence interval estimation.

For the calculations we will be using Python via Ipython (Jupyter) notebooks. Please download the Anaconda distribution that contains Python and many more scientific packages.

The notebooks for this lecture:

• Illustration of Confidence Intervals (View, Download).
• Calibration (View, Download).

Exercise:

• Fiting data.

Recommended Readings

• A Statistical Overview on Univariate Calibration, Inverse Regression, and Detection Limits
• Notes on device calibration
• J Bendat and A Piersol - Statistical Principles - Chapter 4

Lecture 5: Interferometry

In this lecture we will be discussing about the fundamentals of interferometry and its applications.

Lecture 5 slides